MF Sputtering Coating Machine

MF Sputtering coating Machine is a ion coating machine of efficiency, harmless and pollution-free. It has the features of fast deposition rate, great ionization rate, big ion energy, easy operation, low cost, large productive capacity, etc. The series of the equipments mainly integrate the technology of MF magnetron sputtering and electric arc ion evaporation,combining the ion source and the pulse bias voltage .It is full automation control when coating films. It is widely used in the watchband, watchcase,mobile shell,hardware,tableware,etc. It can coat TiN,TiC,TiCNTiAIN,CrN,Cu,Au,Al2O3 and other decorative films. Technical parameter: Mode Dimension JTL-900JTL-1100JTL-1300JTL-1600Φ9001000mmΦ11001000mmΦ13001200 mmΦ1600*1300 mm Coating mode and main confirguration3 electric-arc+2 pairs of plane rectangular cathode6 electric-arc+2 pairs of cylindrical cathode+a pairs of plane rectangular cathode 6electric-arc+4 pairs of cylindrical cathode+a pairs of plane rectangular cathode8electric-arc+8 pairs of cylindrical cathode+a pairs of plane rectangular cathodeApplication metal decorative coatingFilm Types Metal films,Dielectric films,Compound films,Reaction films,Muti-layer function films Power sourceElectric arc power supply,DC magnetron power supply,MF magnetron power supply.Pulse bias voltage power supply.ion source power supply. Process gas controlQuality flowmeter + electromagnetism ceramic valve Vacuum chamber structureVertical single(side) door, pump system postposition, double water-cooling Vacuum systemMolecule pump(diffusion pump)+Roots pump +Mechanical pump (8.0*10-4Pa) Pumping speedPumping time less than 15 minutes ,from atmospheric pressure to 310 -3 PaWorkpiece baking temperature Normal temperature to 350 centi-degree PID control, radiation heating. Workpiece motion modePublic rotation Frequency control: 0-20 rotation per minute Measure mode Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa Control modeFull automation control system PC+PLC/PC+HMI RemarkWe can design the dimension of the equipment according to customers special technique requirement.