multi-function plasma coating machine

multi-function plasma coating machine designed to use advanced plasma technology for achievement of superhard film, Features: it has filament heating and ionization accelerating unit. by use of new target power source, the uniformity of coating and efficiency of ionic shooting can be realized. Carried out coatings:TiN, TiCN, CrN, TiALN, TiNbu, TiCrN, ZrN, and various kinds of diamonds film (DLC). Applied industry: The equipment is widely used in IPG clocks, IPS watches and clocks, guns IP, mobile phone shell, hardware, sanitary ware, cutters, anti-friction tools, dies and mould, etc. Technical parameter: Mode Dimension JTL-800JTL-1100JTL-1250800*1000mm1100*1000mm1250*1300mmCoating mode and main confirgurationSix multi-arc targets + one set of column targets + one set of plane rectangle magnetron sputtering targets Eight multi-arc targets + a pair of twin (MF)magnetron sputtering targets Twelve multi-arc targets + two sets of plane rectangle magnetron sputtering targets+ a pair of twin (MF)magnetron sputtering targets Power sourceElectric arc power, DC magnetron power, MF magnetron power, filament power, pulse power, linear ionized source. Process gas controlQuality flowmeter + electromagnetism ceramic valve Vacuum chamber structureVertical single(side) door, pump system postposition, double water-cooling Vacuum systemMolecule pump +Roots pump +Mechanical pump(5.0*10-5Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10-4Pa) Workpiece baking temperature Normal temperature to 350 centi-degree PID control, radiation heating. Workpiece motion modePublic rotation Frequency control: 0-20 rotation per minute Measure mode Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa Control modeManual/Automatic/PC/PLC + HMI/PC four choice of control mode RemarkWe can design the dimension of the equipment according to customers special technique requirement.